Synthesis

  • Improving energy consumption of PVT process
  • Establish a Digital Twin for SiC Furnaces
  • Correlating precursor and reaction zone purity with SiC crystal purity: toward “ultra-pure” bulk SiC
  • Elucidating the impact of N-doping of SiC on electronic and mechanical properties

Processing

  • Developing novel routes for boule conversion
  • Improving grinding/polishing methods and chemistries for lower cost processing

Metrology

  • in situ growth monitoring techniques
  • Defect quantification in Boule, prior to processing
  • Rapid optical techniques for defect quantification in wafers

Education

  • Establish a semiconductor metrology educational platform with Penn State MCL
  • “Semiconductor Materials Science and Technology” Graduate Minor through the Interdisciplinary Departmental Graduate Program (IDGP) at Penn State
  • Establish apprenticeships with Penn College and Penn State CNEU